ESEM Science and Technology
References: Figure
of merit for environmental SEM and its implications
and
Optimum
beam transfer in the environmental scanning electron microscope
CALCULATOR (*)
(*) Software supplied courtesy Daniel Danilatos
(Calculation log:)
Result:
Click to view gas data used
pD values at which gas flow properties have been computed and fitted with curves below:
Accelerating voltage for sigma (scattering cross-sections) in next table
ARGON
Coefficients 1 for calculation of zeta in the range -4 to 0 diameters below the aperture
Coefficients 2 for calculation of zeta in the range 0 to 20 diameters above the aperture
Coefficients 3 for calculation of normalised density in the range -4 to 0 diameters below the aperture
Coefficients 4 for calculation of normalised density in the range 0 to 20 diameters above the aperture
Sigma used (scattering cross-sections) for the accelerating voltages in previous table
Coefficients 5 for calculation of leak rate hrough aperture
NITROGEN
Coefficients 1 for calculation of zeta in the range -4 to 0 diameters below the aperture
Coefficients 2 for calculation of zeta in the range 0 to 20 diameters above the aperture
Coefficients 3 for calculation of normalised density in the range -4 to 0 diameters below the aperture
Coefficients 4 for calculation of normalised density in the range 0 to 20 diameters above the aperture
Sigma used (scattering cross-sections) for the accelerating voltages in previous table
Coefficients 5 for calculation of leak rate hrough aperture
HELIUM
Coefficients 1 for calculation of zeta in the range -4 to 0 diameters below the aperture
Coefficients 2 for calculation of zeta in the range 0 to 20 diameters above the aperture
Coefficients 3 for calculation of normalised density in the range -4 to 0 diameters below the aperture
Coefficients 4 for calculation of normalised density in the range 0 to 20 diameters above the aperture
Sigma used (scattering cross-sections) for the accelerating voltages in previous table
Coefficients 5 for calculation of leak rate hrough aperture
HYDROGEN
Coefficients 1 for calculation of zeta in the range -4 to 0 diameters below the aperture
Coefficients 2 for calculation of zeta in the range 0 to 20 diameters above the aperture
Coefficients 3 for calculation of normalised density in the range -4 to 0 diameters below the aperture
Coefficients 4 for calculation of normalised density in the range 0 to 20 diameters above the aperture
Sigma used (scattering cross-sections) for the accelerating voltages in previous table
Coefficients 5 for calculation of leak rate hrough aperture
WATER_VAPOR
Coefficients 1 for calculation of zeta in the range -4 to 0 diameters below the aperture
Coefficients 2 for calculation of zeta in the range 0 to 20 diameters above the aperture
Coefficients 3 for calculation of normalised density in the range -4 to 0 diameters below the aperture
Coefficients 4 for calculation of normalised density in the range 0 to 20 diameters above the aperture
Sigma used (scattering cross-sections) for the accelerating voltages in previous table
Coefficients 5 for calculation of leak rate hrough aperture
Oxygen
Coefficients 1 for calculation of zeta in the range -4 to 0 diameters below the aperture
Coefficients 2 for calculation of zeta in the range 0 to 20 diameters above the aperture
Coefficients 3 for calculation of normalised density in the range -4 to 0 diameters below the aperture
Coefficients 4 for calculation of normalised density in the range 0 to 20 diameters above the aperture
Sigma used (scattering cross-sections) for the accelerating voltages in previous table
Coefficients 5 for calculation of leak rate hrough aperture
Neon
Coefficients 1 for calculation of zeta in the range -4 to 0 diameters below the aperture
Coefficients 2 for calculation of zeta in the range 0 to 20 diameters above the aperture
Coefficients 3 for calculation of normalised density in the range -4 to 0 diameters below the aperture
Coefficients 4 for calculation of normalised density in the range 0 to 20 diameters above the aperture
Sigma used (scattering cross-sections) for the accelerating voltages in previous table
Coefficients 5 for calculation of leak rate hrough aperture
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